메뉴 건너뛰기




Volumn 39, Issue 9, 1992, Pages 2060-2069

Micromotor Fabrication

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC MOTORS; SEMICONDUCTING SILICON; SILICON NITRIDE; SURFACES;

EID: 0026925686     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.155878     Document Type: Article
Times cited : (59)

References (17)
  • 1
    • 0026170683 scopus 로고
    • Surface micromachined mechanisms and micromotors
    • June
    • M. Mehregany and Y. C. Tai, “Surface micromachined mechanisms and micromotors,” J. Micromech. Microeng., vol. 1, pp. 73–85, June 1991.
    • (1991) J. Micromech. Microeng. , vol.1 , pp. 73-85
    • Mehregany, M.1    Tai, Y.C.2
  • 3
    • 0009698654 scopus 로고
    • IC-processed polysilicon micromechanics: Technology, material, and devices
    • Berkeley, CA
    • Y. C. Tai, “IC-processed polysilicon micromechanics: Technology, material, and devices,” Ph.D. dissertation. University of California, Berkeley, CA, 1989.
    • (1989) Ph.D. dissertation. University of California
    • Tai, Y.C.1
  • 4
    • 0344063925 scopus 로고    scopus 로고
    • Microfabricated silicon electric mechanisms
    • Ph.D. dissertation, Massachusetts Institute of Technology Cambridge, MA June
    • M. Mehregany, “Microfabricated silicon electric mechanisms,” Ph.D. dissertation,” Massachusetts Institute of Technology, Cambridge, MA, June 1990.
    • Mehregany, M.1
  • 8
    • 0001489745 scopus 로고
    • Principles of design and fabrication of variable-capaci-tance side-drive micromotors
    • July-Aug.
    • M. Mehregany, S. F. Bart, L. S. Tavrow, J. H. Lang, and S. D. Senturia, “Principles of design and fabrication of variable-capaci-tance side-drive micromotors,” J. Vac. Sci. Technol., vol. A-8, pp. 3614–3624, July-Aug. 1990.
    • (1990) J. Vac. Sci. Technol. , vol.A-8 , pp. 3614-3624
    • Mehregany, M.1    Bart, S.F.2    Tavrow, L.S.3    Lang, J.H.4    Senturia, S.D.5
  • 10
  • 12
    • 0025698090 scopus 로고
    • Frictional study of IC-processed micromotors
    • Feb.-April
    • Y. C. Tai and R. S. Muller, “Frictional study of IC-processed mi cromotors,” Sensors and Actuators, vol. A21-A23, pp. 180–183, Feb.-April 1990.
    • (1990) Sensors and Actuators , vol.A21-A23 , pp. 180-183
    • Tai, Y.C.1    Muller, R.S.2
  • 14
    • 33845566733 scopus 로고
    • Control factor of native oxide growth on silicon in air or ultrapure water
    • M. Morita, T. Ohmi, E. Hasegawa, and M. Kawakami, “Control factor of native oxide growth on silicon in air or ultrapure water,” Appl. Phys. Lett., vol. 55, pp. 562–564, 1989.
    • (1989) Appl. Phys. Lett. , vol.55 , pp. 562-564
    • Morita, M.1    Ohmi, T.2    Hasegawa, E.3    Kawakami, M.4
  • 16
    • 0027039704 scopus 로고
    • A comparative study of bearing designs and operational environments for harmonic side-drive micromotors
    • (Travemunde, Germany, Feb.
    • V. R. Dhuler, M. Mehregany, S. M. Phillips, and J. H. Lang, “A comparative study of bearing designs and operational environments for harmonic side-drive micromotors,” in Proc. IEEE Micro Electro Mechanical Systems Workshop (Travemunde, Germany, Feb. 1992), pp. 171–176.
    • (1992) Proc. IEEE Micro Electro Mechanical Systems Workshop , pp. 171-176
    • Dhuler, V.R.1    Mehregany, M.2    Phillips, S.M.3    Lang, J.H.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.