-
1
-
-
0026170683
-
Surface micromachined mechanisms and micromotors
-
June
-
M. Mehregany and Y. C. Tai, “Surface micromachined mechanisms and micromotors,” J. Micromech. Microeng., vol. 1, pp. 73–85, June 1991.
-
(1991)
J. Micromech. Microeng.
, vol.1
, pp. 73-85
-
-
Mehregany, M.1
Tai, Y.C.2
-
2
-
-
0013352584
-
Integrated micromachining: Moving structures on silicon chips
-
L. S. Fan, “Integrated micromachining: Moving structures on silicon chips,” Ph.D. dissertation, University of California, Berkeley, CA, 1989.
-
(1989)
Ph.D. dissertation, University of California, Berkeley, CA
-
-
Fan, L.S.1
-
3
-
-
0009698654
-
IC-processed polysilicon micromechanics: Technology, material, and devices
-
Berkeley, CA
-
Y. C. Tai, “IC-processed polysilicon micromechanics: Technology, material, and devices,” Ph.D. dissertation. University of California, Berkeley, CA, 1989.
-
(1989)
Ph.D. dissertation. University of California
-
-
Tai, Y.C.1
-
4
-
-
0344063925
-
Microfabricated silicon electric mechanisms
-
Ph.D. dissertation, Massachusetts Institute of Technology Cambridge, MA June
-
M. Mehregany, “Microfabricated silicon electric mechanisms,” Ph.D. dissertation,” Massachusetts Institute of Technology, Cambridge, MA, June 1990.
-
-
-
Mehregany, M.1
-
5
-
-
84915399148
-
Modeling and design of electroquasistatic microactuators
-
Cambridge, MA, Sept.
-
S. F. Bart, “Modeling and design of electroquasistatic microactua tors,” Ph.D. dissertation, Massachusetts Institute of Technology, Cambridge, MA, Sept. 1990.
-
(1990)
Ph.D. dissertation, Massachusetts Institute of Technology
-
-
Bart, S.F.1
-
6
-
-
33748030029
-
A LOCOS-based microfabricated radial-gap electric motor
-
Cambridge, MA, Feb.
-
L. S. Tavrow, “A LOCOS-based microfabricated radial-gap electric motor,” Ph.D. dissertation, Massachusetts Institute of Technology, Cambridge, MA, Feb. 1991.
-
(1991)
Ph.D. dissertation, Massachusetts Institute of Technology
-
-
Tavrow, L.S.1
-
7
-
-
0025698130
-
A study of three microfabricated variable-capacitance motors
-
Feb.-Apr.
-
M. Mehregany, S. F. Bart, L. S. Tavrow, J. H. Lang, S. D. Senturia, and M. F. Schlecht, “A study of three microfabricated variable-capacitance motors,” Sensors and Actuators, vol. A21-A23, pp. 173–179, Feb.-Apr. 1990.
-
(1990)
Sensors and Actuators
, vol.A21-A23
, pp. 173-179
-
-
Mehregany, M.1
Bart, S.F.2
Tavrow, L.S.3
Lang, J.H.4
Senturia, S.D.5
Schlecht, M.F.6
-
8
-
-
0001489745
-
Principles of design and fabrication of variable-capaci-tance side-drive micromotors
-
July-Aug.
-
M. Mehregany, S. F. Bart, L. S. Tavrow, J. H. Lang, and S. D. Senturia, “Principles of design and fabrication of variable-capaci-tance side-drive micromotors,” J. Vac. Sci. Technol., vol. A-8, pp. 3614–3624, July-Aug. 1990.
-
(1990)
J. Vac. Sci. Technol.
, vol.A-8
, pp. 3614-3624
-
-
Mehregany, M.1
Bart, S.F.2
Tavrow, L.S.3
Lang, J.H.4
Senturia, S.D.5
-
9
-
-
0026835842
-
Electric micromotor dynamics
-
Mar.
-
S. F. Bart, M. Mehregany, L. S. Tavrow, J. H. Lang, and S. D. Senturia, “Electric micromotor dynamics,” IEEE Trans. Electron Devices, vol. 39, pp. 566–575, Mar. 1992.
-
(1992)
IEEE Trans. Electron Devices
, vol.39
, pp. 566-575
-
-
Bart, S.F.1
Mehregany, M.2
Tavrow, L.S.3
Lang, J.H.4
Senturia, S.D.5
-
10
-
-
0026868350
-
Measurement of wear in polysilicon micromotors
-
May
-
M. Mehregany, S. D. Senturia, and J. H. Lang, “Measurement of wear in polysilicon micromotors,” IEEE Trans. Electron Devices, vol. 39, pp. 1136–1143, May 1992.
-
(1992)
IEEE Trans. Electron Devices
, vol.39
, pp. 1136-1143
-
-
Mehregany, M.1
Senturia, S.D.2
Lang, J.H.3
-
11
-
-
0025644075
-
Operation of microfabricated harmonic and ordinary side-drive motors
-
(Napa Valley, CA Feb.
-
M. Mehregany, P. Nagarkar, S. D. Senturia, and J. H. Lang, “Operation of microfabricated harmonic and ordinary side-drive motors,” in Proc. IEEE Micro Electro Mechanical Systems Workshop (Napa Valley, CA, Feb. 1990), pp. 1–8.
-
(1990)
Proc. IEEE Micro Electro Mechanical Systems Workshop
, pp. 1-8
-
-
Mehregany, M.1
Nagarkar, P.2
Senturia, S.D.3
Lang, J.H.4
-
12
-
-
0025698090
-
Frictional study of IC-processed micromotors
-
Feb.-April
-
Y. C. Tai and R. S. Muller, “Frictional study of IC-processed mi cromotors,” Sensors and Actuators, vol. A21-A23, pp. 180–183, Feb.-April 1990.
-
(1990)
Sensors and Actuators
, vol.A21-A23
, pp. 180-183
-
-
Tai, Y.C.1
Muller, R.S.2
-
13
-
-
0025604021
-
Polysilicon microstructures to characterize static friction
-
(Napa Valley, CA Feb.
-
M. G. Lim, J. C. Chang, D. P. Schultz, R. T. Howe, and R. M. White, “Polysilicon microstructures to characterize static friction,” in Proc. IEEE Micro Electro Mechanical Systems Workshop (Napa Valley, CA, Feb. 1990), pp. 82–88.
-
(1990)
Proc. IEEE Micro Electro Mechanical Systems Workshop
, pp. 82-88
-
-
Lim, M.G.1
Chang, J.C.2
Schultz, D.P.3
Howe, R.T.4
White, R.M.5
-
14
-
-
33845566733
-
Control factor of native oxide growth on silicon in air or ultrapure water
-
M. Morita, T. Ohmi, E. Hasegawa, and M. Kawakami, “Control factor of native oxide growth on silicon in air or ultrapure water,” Appl. Phys. Lett., vol. 55, pp. 562–564, 1989.
-
(1989)
Appl. Phys. Lett.
, vol.55
, pp. 562-564
-
-
Morita, M.1
Ohmi, T.2
Hasegawa, E.3
Kawakami, M.4
-
15
-
-
0026372171
-
Operation of harmonic side-drive micromotors studied through gear ratio measurements
-
(San Francisco, CA June
-
M. Mehregany, S. M. Phillips, E. T. Hsu, and J. H. Lang, “Operation of harmonic side-drive micromotors studied through gear ratio measurements,” in Tech. Dig. 6th Int. Conf. on Solid-State Sensors and Actuators (San Francisco, CA, June 1991), pp. 59–62.
-
(1991)
Tech. Dig. 6th Int. Conf. on Solid-State Sensors and Actuators
, pp. 59-62
-
-
Mehregany, M.1
Phillips, S.M.2
Hsu, E.T.3
Lang, J.H.4
-
16
-
-
0027039704
-
A comparative study of bearing designs and operational environments for harmonic side-drive micromotors
-
(Travemunde, Germany, Feb.
-
V. R. Dhuler, M. Mehregany, S. M. Phillips, and J. H. Lang, “A comparative study of bearing designs and operational environments for harmonic side-drive micromotors,” in Proc. IEEE Micro Electro Mechanical Systems Workshop (Travemunde, Germany, Feb. 1992), pp. 171–176.
-
(1992)
Proc. IEEE Micro Electro Mechanical Systems Workshop
, pp. 171-176
-
-
Dhuler, V.R.1
Mehregany, M.2
Phillips, S.M.3
Lang, J.H.4
-
17
-
-
0026384281
-
A preliminary study on friction measurements in MEMS
-
(San Francisco, CA June
-
K. Deng, W. H. Ko, and G. Michal, “A preliminary study on friction measurements in MEMS,” in Tech. Dig. 6th Int. Conf. on Solid-State Sensors and Actuators (San Francisco, CA, June 1991), pp. 213–216.
-
(1991)
Tech. Dig. 6th Int. Conf. on Solid-State Sensors and Actuators
, pp. 213-216
-
-
Deng, K.1
Ko, W.H.2
Michal, G.3
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