Liquid-Nitrogen-Cooled dry etching of YBaCuO thin films

Japanese Journal of Applied Physics

Volumn 31, Issue 8, 1992, Pages L1044-L1046

  Sato, Hiroshi ^a   Akoh, Hiroshi ^a   Nishihara, Keirou ^a   Aoyagi, Masahiro ^a   Takada, Susumu ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

Dry etching; Etching damage; Jc; Liquid nitrogen cooling; Surfaceetching; Tc; Ybacuo films

Indexed keywords

CERAMIC MATERIALS; ETCHING; THIN FILMS; YTTRIUM COMPOUNDS;

OXIDE SUPERCONDUCTORS; YTTRIUM BARIUM COPPER OXIDES;

HIGH TEMPERATURE SUPERCONDUCTORS;

EID: 0026910467     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.31.L1044     Document Type: Article

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