Numerical Analysis of a Cylindrical Thin-Pillar Transistor (CYNTHIA)

IEEE Transactions on Electron Devices

Volumn 39, Issue 8, 1992, Pages 1876-1881

  Miyano, Shinji ^a   Hirose, Mayumi ^a   Masuoka, Fujio ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, LSI; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE--SILICON ON INSULATOR TECHNOLOGY;

CYLINDRICAL TRANSISTORS; MOS TRANSISTORS; SOI TRANSISTORS; THIN-PILLAR TRANSISTORS; ULTRA-HIGH-DENSITY LSI; VERTICAL TRANSISTORS;

TRANSISTORS, FIELD EFFECT;

EID: 0026909715     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.144678     Document Type: Article

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