Epitaxial CoSi2 and NiSi2 thin films

Materials Chemistry and Physics

Volumn 32, Issue 2, 1992, Pages 107-133

  Tung, R T ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT COMPOUNDS; CRYSTAL ATOMIC STRUCTURE; EPITAXIAL GROWTH; FABRICATION; INTERFACES (MATERIALS); NICKEL COMPOUNDS; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR METAL BOUNDARIES; THIN FILMS;

COBALT SILICIDE; METAL/SEMICONDUCTOR INTERFACES; NICKEL SILICIDE;

SEMICONDUCTOR MATERIALS;

EID: 0026908987     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/0254-0584(92)90268-D     Document Type: Review

References (207)

1. Optical constants of thin CoSi2 films on silicon
2. First phase nucleation in silicon–transition-metal planar interfaces
3. Epitaxial Growth of Nickel Silicide NiSi2on Silicon
4. Epitaxial Growth of Transition Metal Silicides on Silicon
5. Cross-sectional transmission electron microscopy of silicon-silicide interfaces
6. Silicon/metal silicide heterostructures grown by molecular beam epitaxy
7. Schottky barrier formation at Pd, Pt, and Ni/Si(111) interfaces
8. Growth of GaAs on Si and its Application to FETs and LEDs
9. Transmission electron microscopy of the formation of nickel silicides
10. Chemical bonding at the Si–metal interface: Si–Ni and Si–Cr
11. NiSi2 layers grown on Si (111) by MBE and SPE
12. Room-temperature growth of ultrathin Ni films on Si(111)
13. Stranski-Krastanov Growth of Ni on Si(111) at Room Temperature
14. Growth of Thin Nickel Silicide Layers on Clean B-Doped Si(111) Surfaces at Room Temperature
15. Growth of Epitaxial CoSi2 and NiSi2 on (111), (100), and (110) Si at Room Temperature
16. Growth of ultrathin single-crystal NiSi2 layers on Si(111)
17. Formation of Embedded Monocrystalline NiSi2Grid Layers in Silicon by MBE
18. Conductivity and mobility in very thin epitaxial NiSi2 layers
19. Structural Characterization and Schottky Barrier Height Measurements of Epitaxial NiSi2 on Si
20. On the stability of thin epitaxial NiSi2 layers on Si (111)
21. The Role of Lattice Mismatch in Growth of Epitaxial Cubic Silicides on Silicon
22. Determination of lattice mismatch in NiSi2 overlayers on Si(111)
23. Evolution of Stress During Heteroepitaxial Growth of NiSi2 on (001) and (111) Silicon Substrates
24. Ballistic electron emission in silicide–silicon interfaces
25. Lattice Imaging of Silicide–Silicon Interfaces and the Interpretation of Interfacial Defects
26. Intrinsic interface states and defect states for Si/NiSi2(111)
27. Theoretical studies of metal disilicide–silicon interfaces
28. Theory of Surface States
29. ‘‘Coreless defects’’ and the continuity of epitaxial NiSi2/Si(100) thin films
30. Surface structure and the origin of interfacial dislocations in epitaxial films
31. presented at Third Ind. Conf. Formation Semicond. Interfaces
32. Schottky Barrier Heights at Singe Crystal Metal Semiconductor Interfaces
33. Correlation of Electrical Properties with Structure Imaging of Semiconductor Interfaces
34. Electron Transport Through Epitaxial Metal/Semiconductor Heterostructures
35. Single crystal silicide silicon interfaces: Structures and barrier heights
36. 93
37. A transmission electron microscopic study of the topography of clean Si(111) surfaces
38. Uniformity and crystalline quality of CoSi2/Si heterostructures grown by molecular beam epitaxy and reactive deposition epitaxy
39. Kinetics of formation and properties of epitaxial CoSi2 films on Si (111)
40. On the Critical Layer Thickness of Strained-Layer Heteroepitaxial CoSi2 Films on 〈111〉Si
41. Surface and interface structure of epitaxial CoSi2 films on Si(111)
42. An Interfacial Phase Transformation in CoSi2/Si(111)
43. Epitaxial silicide interfaces: Fabrication and properties
44. Epitaxial NiSi2 and CoSi2 Interfaces
45. Surface chemical shifts and photoelectron diffraction in CoSi2
46. Transient capacitance study of epitaxial CoSi2/Si〈111〉 Schottky barriers
47. Electronic Structure of Epitaxial Silicon Interfaces
48. Ultrathin Single Crystal CoSi2 Layers on Si(111) and Si(100)
49. Epitaxial orientation and morphology of thin CoSi2 films grown on Si(100): Effects of growth parameters
50. Growth and Characterization of Epitaxial CoSi2 on Si(001)
51. Growth of Thin Epitaxial CoSi2 Layers on Si(100)
52. Growth and characterization of metal/semiconductor superlattices