Focusing Grating Coupler in AlGaAs Optical Waveguide

IEEE Photonics Technology Letters

Volumn 4, Issue 8, 1992, Pages 903-905

  Suhara, T ^a   Okada, K ^a   Saso, T ^a   Nishihara, H ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; DIFFRACTION GRATINGS; ELECTRON BEAMS; ETCHING; FABRICATION; SEMICONDUCTING ALUMINUM COMPOUNDS; WAVEGUIDE COUPLERS;

ALUMINUM GALLIUM ARSENIDE; ELECTRON BEAM WRITING; FOCUSING GRATING COUPLERS; REACTIVE ION ETCHING; SEMICONDUCTOR WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 0026901623     PISSN: 10411135     EISSN: 19410174     Source Type: Journal    
DOI: 10.1109/68.149903     Document Type: Article

References (12)

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