Microfabrication of AFM tips using focused ion and electron beam techniques

Ultramicroscopy

Volumn 42-44, Issue PART 2, 1992, Pages 1526-1532

  Ximen, Hongyu ^a   Russell, Phillip E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPONENTS; DEGRADATION; ELECTRON BEAMS; FABRICATION; GALLIUM; ION BEAMS; ION IMPLANTATION; MICROMACHINING; SPECIMEN PREPARATION;

ATOMIC FORCE MICROSCOPE; PYRAMIDAL TIPS; SUBMICRON AND HIGH TOPOGRAPHY STRUCTURES; TIP FABRICATION;

MICROSCOPES;

ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; MICROSCOPY;

EID: 0026896867     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/0304-3991(92)90477-2     Document Type: Article

References (13)

1. Microfabrication of cantilever styli for the atomic force microscope
2. New scanning tunneling microscopy tip for measuring surface topography
3. Micropattern measurement with an atomic force microscope
4. High-resolution electron-beam induced deposition
5. Direct electron-beam patterning for nanolithography
6. H. Ximen and P.E. Russell, Appl. Phys. Lett., submitted.
7. Focused ion beam micromachined three-dimensional features by means of a digital scan
8. Characterization of focused ion beam micromachined features