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Journal of Micromechanics and Microengineering

Volumn 2, Issue 2, 1992, Pages 43-74

Vacuum microelectronics-1992

(1) Busta, H H a

a BP EXPLORATION (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BALLISTIC TRANSPORT; BULK MICROMACHINING; COLD EMISSION; COLLECTOR ELECTRODES; SURFACE MICROMACHINING; VACUUM MICROELECTRONICS;

APPLICATIONS; ARRAYS; ELECTRON EMISSION; FABRICATION; MICROMACHINING; SEMICONDUCTOR DEVICE STRUCTURES; TESTING; VACUUM APPLICATIONS;

MICROELECTRONICS;

EID: 0026871966 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/2/2/001 Document Type: Review

Times cited : (99)

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