메뉴 건너뛰기




Volumn 39, Issue 2, 1992, Pages 269-271

“Border Traps” in MOS Devices

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS--DEFECTS; MICROWAVES; SEMICONDUCTING SILICON;

EID: 0026853994     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/23.277495     Document Type: Article
Times cited : (306)

References (22)
  • 1
    • 84886361962 scopus 로고
    • Standardized terminology for oxide charges associated with thermally oxidized silicon
    • B. E. Deal, “Standardized terminology for oxide charges associated with thermally oxidized silicon,” IEEE Trans. Electron Dev., vol. ED-27, no. 3, pp. 606–607, 1980.
    • (1980) IEEE Trans. Electron Dev. , vol.ED-27 , Issue.3 , pp. 606-607
    • Deal, B.E.1
  • 2
    • 0019529879 scopus 로고
    • Interface states and electron spin resonance centers in thermally oxidized (111) and (100) silicon wafers
    • E. H. Poindexter, P. J. Caplan, B. E. Deal, and R. R. Razouk, “Interface states and electron spin resonance centers in thermally oxidized (111) and (100) silicon wafers,” J. Appl. Phys., vol. 52, p. 879, 1981.
    • (1981) J. Appl. Phys. , vol.52 , pp. 879
    • Poindexter, E.H.1    Caplan, P.J.2    Deal, B.E.3    Razouk, R.R.4
  • 3
    • 0021427238 scopus 로고
    • Hole traps and trivalent silicon centers in MOS devices
    • P. M. Lenahan and P. V. Dressendorfer, “Hole traps and trivalent silicon centers in MOS devices,” J. Appl. Phys., vol. 55, no. 10, pp. 3495–3499, 1984.
    • (1984) J. Appl. Phys. , vol.55 , Issue.10 , pp. 3495-3499
    • Lenahan, P.M.1    Dressendorfer, P.V.2
  • 4
    • 0000269527 scopus 로고
    • Evidence of the surface origin of the 1/f noise
    • C. T. Sah and F. H. Hielscher, “Evidence of the surface origin of the 1/f noise,” Phys. Rev. Lett., vol. 17, no. 18, pp. 956–958, 1966.
    • (1966) Phys. Rev. Lett. , vol.17 , Issue.18 , pp. 956-958
    • Sah, C.T.1    Hielscher, F.H.2
  • 6
    • 0347675615 scopus 로고
    • Observation of slow states in conductance measurements on Si MOS capacitors
    • M. J. Uren, S. Collins, and M. J. Kirton, “Observation of slow states in conductance measurements on Si MOS capacitors,” Appl. Phys. Lett., vol. 54, no. 15, pp. 1448–1450, 1989.
    • (1989) Appl. Phys. Lett. , vol.54 , Issue.15 , pp. 1448-1450
    • Uren, M.J.1    Collins, S.2    Kirton, M.J.3
  • 7
    • 36549092971 scopus 로고
    • Interface and bulk trap generation in MOS capacitors
    • D. A. Buchanan and D. J. DiMaria, “Interface and bulk trap generation in MOS capacitors,” J. Appl. Phys., vol. 67, no. 12, pp. 7439–7452, 1990.
    • (1990) J. Appl. Phys. , vol.67 , Issue.12 , pp. 7439-7452
    • Buchanan, D.A.1    DiMaria, D.J.2
  • 8
    • 0001297015 scopus 로고
    • Rechargeable E’ centers in sputter-deposited Si02 films
    • M. E. Zvanut, F. J. Feigl, W. B. Fowler, and J. K. Rudra, “Rechargeable E’ centers in sputter-deposited Si02 films,” Appl. Phys. Lett., vol. 54, p. 2118, 1989.
    • (1989) Appl. Phys. Lett. , vol.54 , pp. 2118
    • Zvanut, M.E.1    Feigl, F.J.2    Fowler, W.B.3    Rudra, J.K.4
  • 10
    • 0000655342 scopus 로고
    • Evidence that similar point defects cause 1/f noise and radiation-induced-hole trapping in MOS transistors
    • D. M. Fleetwood and J. H. Scofield, “Evidence that similar point defects cause 1/f noise and radiation-induced-hole trapping in MOS transistors,” Phys. Rev. Lett., vol. 64, no. 5, pp. 579–582, 1990.
    • (1990) Phys. Rev. Lett. , vol.64 , Issue.5 , pp. 579-582
    • Fleetwood, D.M.1    Scofield, J.H.2
  • 11
    • 0025631160 scopus 로고
    • Effect of radiation-induced charge on 1/f noise in MOS devices
    • T. L. Meisenheimer and D. M. Fleetwood, “Effect of radiation-induced charge on 1/f noise in MOS devices,” IEEE Trans. Nucl. Sci., vol. 37, no. 6, pp. 1696–1702, 1990.
    • (1990) IEEE Trans. Nucl. Sci. , vol.37 , Issue.6 , pp. 1696-1702
    • Meisenheimer, T.L.1    Fleetwood, D.M.2
  • 12
    • 0001636425 scopus 로고
    • Individual oxide traps as probes into submicron devices
    • P. J. Restle, “Individual oxide traps as probes into submicron devices,” Appl. Phys. Lett., vol. 53, no. 19, 1862–1864, 1988.
    • (1988) Appl. Phys. Lett. , vol.53 , Issue.19 , pp. 1862-1864
    • Restle, P.J.1
  • 13
    • 0012278046 scopus 로고
    • Noise in solid-state microstructures: A new perspective on individual defects, interface states, and low-frequency (1/f) noise
    • M. J. Kirton and M. J. Uren, “Noise in solid-state microstructures: A new perspective on individual defects, interface states, and low-frequency (1/f) noise,” Advances in Physics, vol. 38, no. 4, pp. 367–468, 1989.
    • (1989) Advances in Physics , vol.38 , Issue.4 , pp. 367-468
    • Kirton, M.J.1    Uren, M.J.2
  • 14
    • 0024890327 scopus 로고
    • A spin dependent recombination study of radiation induced defects at and near the Si/Si02 interface
    • M. A. Jupina and P. M. Lenahan, “A spin dependent recombination study of radiation induced defects at and near the Si/Si02 interface,” IEEE Trans. Nucl. Sci., vol. NS-36, no. 6, pp. 1800–1807, 1989.
    • (1989) IEEE Trans. Nucl. Sci. , vol.NS-36 , Issue.6 , pp. 1800-1807
    • Jupina, M.A.1    Lenahan, P.M.2
  • 15
    • 84858360253 scopus 로고
    • The structure of the Si/Si02 interface: An overview
    • edited by C. R. Helms and B. E. Deal, (eds.), New York: Plenum
    • A. Ourmazd and J. Bevk, “The structure of the Si/Si02 interface: An overview,” in The Physics and Chemistry of SiO2 and the Si/SiO2 Interface, edited by C. R. Helms and B. E. Deal, (eds.), New York: Plenum, 1988, 189–198.
    • (1988) The Physics and Chemistry of SiO2 and the Si/SiO2 Interface , pp. 189-198
    • Ourmazd, A.1    Bevk, J.2
  • 16
    • 0022201163 scopus 로고
    • Hole removal in thin-gate MOSFETs by tunneling
    • J. M. Benedetto, H. E. Boesch, Jr., F. B. McLean, and J. P. Mize, “Hole removal in thin-gate MOSFETs by tunneling,” IEEE Trans. Nucl. Sci., vol. NS-32, no. 6, pp. 3916–3920, 1985.
    • (1985) IEEE Trans. Nucl. Sci. , vol.NS-32 , Issue.6 , pp. 3916-3920
    • Benedetto, J.M.1    Boesch, H.E.2    McLean, F.B.3    Mize, J.P.4
  • 17
    • 0002772669 scopus 로고
    • Electron-hole generation, transport, and trapping in Si02
    • T. P. Ma and P. V. Dressendorfer, (eds.), New York: Wiley
    • F. B. McLean, H. E. Boesch, Jr., and T. R. Oldham, “Electron-hole generation, transport, and trapping in Si02,” in Ionizing Radiation Effects in MOS Devices and Circuits, T. P. Ma and P. V. Dressendorfer, (eds.), New York: Wiley, 1989, pp. 158–167.
    • (1989) Ionizing Radiation Effects in MOS Devices and Circuits , pp. 158-167
    • McLean, F.B.1    Boesch, H.E.2    Oldham, T.R.3
  • 18
    • 0021599338 scopus 로고
    • Radiation effects in MOS capacitors with very thin oxides at 80 K
    • N. S. Saks, M. G. Ancona, and J. A. Modolo, “Radiation effects in MOS capacitors with very thin oxides at 80 K,” IEEE Trans. Nucl. Sci., vol. NS-31, no. 6, pp. 1249–1255, 1984.
    • (1984) IEEE Trans. Nucl. Sci. , vol.NS-31 , Issue.6 , pp. 1249-1255
    • Saks, N.S.1    Ancona, M.G.2    Modolo, J.A.3
  • 19
    • 0000502943 scopus 로고
    • Hole trapping phenomena in the gate insulator of as-fabricated insulated gate field effect transistors
    • L. Lipkin, A. Reisman, and C. K. Williams, “Hole trapping phenomena in the gate insulator of as-fabricated insulated gate field effect transistors,” J. Appl. Phys., vol. 68, no. 9, pp. 4620–4633, 1990.
    • (1990) J. Appl. Phys. , vol.68 , Issue.9 , pp. 4620-4633
    • Lipkin, L.1    Reisman, A.2    Williams, C.K.3
  • 20
    • 0024913722 scopus 로고
    • The nature of the trapped hole annealing process
    • A. J. Lelis, T. R. Oldham, H. E. Boesch, Jr., and F. B. McLean, “The nature of the trapped hole annealing process,” IEEE Trans. Nucl. Sci., vol. 36, No. 6, pp. 1808–1815, 1989.
    • (1989) IEEE Trans. Nucl. Sci. , vol.36 , Issue.6 , pp. 1808-1815
    • Lelis, A.J.1    Oldham, T.R.2    Boesch, H.E.3    McLean, F.B.4
  • 21
    • 0026396455 scopus 로고
    • Effect of bias on thermally stimulated current in irradiated MOS devices
    • D. M. Fleetwood, R. A. Reber, Jr., and P. S. Winokur, “Effect of bias on thermally stimulated current in irradiated MOS devices,” IEEE Trans. Nucl. Sci., vol. 38, no. 6, pp. 1066–1077, 1991.
    • (1991) IEEE Trans. Nucl. Sci. , vol.38 , Issue.6 , pp. 1066-1077
    • Fleetwood, D.M.1    Reber, R.A.2    Winokur, P.S.3
  • 22
    • 0025682742 scopus 로고
    • Post-irradiation behavior of the interface state density and the trapped positive charge
    • R. E. Stahlbush, B. J. Mrstik, and R. K. Lawrence, “Post-irradiation behavior of the interface state density and the trapped positive charge,” IEEE Trans. Nucl. Sci., vol. 37, no. 6, pp. 1641–1649, 1990.
    • (1990) IEEE Trans. Nucl. Sci. , vol.37 , Issue.6 , pp. 1641-1649
    • Stahlbush, R.E.1    Mrstik, B.J.2    Lawrence, R.K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.