Electrical resistance of metallic contacts on silicon and germanium during indentation

Journal of Materials Research

Volumn 7, Issue 4, 1992, Pages 961-972

  Dinger, T R ^d   Clarke, D R ^d  

^a RICE UNIVERSITY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MEASUREMENTS - RESISTANCE; GERMANIUM AND ALLOYS; METALS AND ALLOYS - PHASE TRANSITIONS; SILICON AND ALLOYS;

INDENTATION; METALLIC CONTACTS; NANOINDENTATION TECHNIQUES;

METALS AND ALLOYS;

EID: 0026853101     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1992.0961     Document Type: Article

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