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Volumn 47, Issue 4, 1992, Pages 481-491
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Temperature and electron density measurements in a helium/hydrogen capacitively coupled microwave plasma
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
HELIUM;
HYDROGEN;
PLASMAS - TEMPERATURE MEASUREMENT;
SPECTROMETERS - APPLICATIONS;
CAPACITIVELY COUPLED MICROWAVE PLASMA;
ELECTRON DENSITY;
PLASMAS;
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EID: 0026852732
PISSN: 05848547
EISSN: None
Source Type: Journal
DOI: 10.1016/0584-8547(92)80041-E Document Type: Article |
Times cited : (30)
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References (35)
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