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Plasma Chemistry and Plasma Processing
Volumn 12, Issue 1, 1992, Pages 55-69
Process study of thermal plasma chemical vapor deposition of diamond, part II: Pressure dependence and effect of substrate pretreatment
Author keywords

chemical vapor deposition; Diamond films; thermal plasma synthesis
Indexed keywords

DIAMONDS - SYNTHETIC; FILMS - CHEMICAL VAPOR DEPOSITION; PRESSURE EFFECTS; SUBSTRATES - EFFECTS;
EID: 0026840175     PISSN: 02724324     EISSN: 15728986     Source Type: Journal    
DOI: 10.1007/BF01447944     Document Type: Article
Times cited : (12)
References (23)
  • 4
    • 84934364031 scopus 로고    scopus 로고
    • N. Fujimori and A. Hara, “Technological Application of CVD Diamond,”Proc. of the 1st Int. Symp. on Diamond and Diamond-Like Films, The Electrochem. Soc., Pennington, New Jersey, 1989, J. P. Dismukes, A. J. Purdes, K. E. Spear, B. S. Meyerson, K. V. Ravi, T. D. Moustakas, and M. Yoder, eds. (1989), p. 14.
  • 6
    • 84934364032 scopus 로고    scopus 로고
    • P. K. Bachmann and H. Lydtin, “Diamond Forming Discharges,”Mater. Res. Soc. Symp. Proc., Vol. 165, Characterization of Plasma-Enhanced CVD Processes, Materials Research Society, Pittsburgh, Pennsylvania, 1989, G. Lucovsky, D. E. Ibbotson, and D. W. Hess, eds. (1989), p. 181.
  • 9
    • 84934364025 scopus 로고    scopus 로고
    • S. Matsumoto, “Deposition of Diamond from Thermal Plasma,”Diamond and Diamond-Like Materials Synthesis, MRS Extended Abstracts, Materials Research Society, Pittsburgh, Pennsylvania, 1988, G. H. Johnson, A. R. Badzian, and M. W. Geis, eds. (1988), p.119.
  • 10
    • 84934364026 scopus 로고    scopus 로고
    • P. Klocek, J. Hoggins, P. Taborek, and T. Mckenna, “CVD Diamond by DC Plasma Torch,”SPIE Proceedings, Vol. 1325, Diamond Optics III, SPIE (the Int. Soc. for Optical Eng.), A. Feldman and S. Holly, eds. (1990), p.63.
  • 12
    • 84934364027 scopus 로고    scopus 로고
    • W. Zhu, R. Messier, and A. R. Badzian, “Effects of Process Parameters on CVD Diamond Films,”Int. Symp. on Diamond and Diamond-Like Films, The Electrochem. Soc., Pennington, New Jersey, 1989, J. P. Dismukes, A. J. Purdes, K. E. Spear, B. S. Meyerson, K. V. Ravi, T. D. Moustakas, and M. Yoder, eds. (1989), p.61.
  • 15
    • 84934364028 scopus 로고    scopus 로고
    • Z. P. Lu, T. W. Or, L. Stachowicz, J. Heberlein, and E. Pfender, “Diamond CVD in Thermal Plasmas,” presented in 1991 national meeting of Am. Soc. Mech. Eng., Minneapolis, July 28–31, 1991.
  • 19
    • 84934364052 scopus 로고    scopus 로고
    • P. K. Bachmann, H. Lydtin, D. U. Wiechert, J. J. Beulens, G. M. W. Kroesen, and D. C. Schram, “Diamond Deposition from a Cascaded Arc DC Plasma,”Proc. of the 3rd Int. Conf. on Surface Modification Technologies, Surface Modification Technologies III, The Mineral, Metals, and Materials Soc., Warrendale, Pennsylvania, T. S. Sudarshan and D. G. Bhat, eds. (1990), p. 69.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.