Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films

Sensors and Actuators: A. Physical

Volumn 31, Issue 1-3, 1992, Pages 153-158

  Morten, B ^a   De Cicco, G ^a   Prudenziati, M ^a  

^a UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS - THICK FILMS; GASES - PRESSURE MEASUREMENT; PIEZOELECTRIC DEVICES; SENSORS - DESIGN;

ALUMINA DIAPHRAGM; PHASE-LOCKED LOOP TECHNIQUE; RESONANT SENSOR; STATIC PRESSURE;

PRESSURE MEASUREMENT;

EID: 0026840111     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80096-L     Document Type: Article

References (7)

1. Piezoelectric properties of PZT-thick films
2. Piezoelectric thick film accelerometer for automotive applications
3. Advances in ferroelectric thick-film materials and sensors