Fabrication of High Quality Nb/AlO-Al/Nb Josephson Junctions: I—Sputtered Nb Films for Junction Electrodes

IEEE Transactions on Applied Superconductivity

Volumn 2, Issue 1, 1992, Pages 1-14

  Imamura, Takeshi ^a   Shiota, Tetsuyoshi ^a   Hasuo, Shinya ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - STRUCTURE; NIOBIUM AND ALLOYS - THIN FILMS; SPUTTERING; SUPERCONDUCTING DEVICES - FABRICATION; SURFACES - MORPHOLOGY;

JOSEPHSON INTEGRATED CIRCUITS; JUNCTION ELECTRODES; MAGNETRON SPUTTERING; SPUTTERED FILMS;

SUPERCONDUCTING DEVICES;

EID: 0026839095     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.124922     Document Type: Article

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