Design, fabrication, and operation of submicron gap comb-drive microactuators

Journal of Microelectromechanical Systems

Volumn 1, Issue 1, 1992, Pages 52-59

  Hirano, Toshiki ^a   Furuhata, Tomotake ^a   Gabriel, Kaigham J ^b,c,d,e,f   Fujita, Hiroyuki ^g  

^a IBM RESEARCH   (United States)

^b UNIVERSITY OF TOKYO   (Japan)

^c LUCENT TECHNOLOGIES   (United States)

^d BOSTON UNIVERSITY   (United States)

^e MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^f NAVAL RESEARCH LABORATORY   (United States)

^g INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES - FABRICATION;

COMB DRIVE ACTUATORS; ELECTROSTATIC ACTUATORS; MICROACTUATORS;

ELECTROMECHANICAL DEVICES;

EID: 0026838963     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.128056     Document Type: Article

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