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Volumn 1, Issue 1, 1992, Pages 37-43

Micromechanical velcro

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES;

EID: 0026837857     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.128054     Document Type: Article
Times cited : (38)

References (13)
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    • (1991) IEEE Workshop Micro Electro Mech. Syst. (MEMS-91) , pp. 253-258
    • Han, H.1    Weiss, L.E.2    Reed, M.L.3
  • 2
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    • A mechanical surface hesive using micromachined silicon structures
    • H. Han, M. L. Reed, and L. E. Weiss, “A mechanical surface hesive using micromachined silicon structures,” J. Micromechanics and Microeng., vol. 1, no. 1, pp. 30–33, 1991.
    • (1991) J. Micromechanics and Microeng. , vol.1 , Issue.1 , pp. 30-33
    • Han, H.1    Reed, M.L.2    Weiss, L.E.3
  • 3
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    • Compensating corner undercutting sotropic etching of (100) silicon
    • X. Wu and W. H. Ko, “Compensating corner undercutting sotropic etching of (100) silicon,” Sensors and Actuators, vol. 18, pp. 207–215, 1989.
    • (1989) Sensors and Actuators , vol.18 , pp. 207-215
    • Wu, X.1    Ko, W.H.2
  • 4
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    • Silicon-on-insulator wafer bonding-wafer thinning technological evaluations
    • J. Haisma, G. A. C. M. Spierings, U. K. P. Biermann, Pals, “Silicon-on-insulator wafer bonding-wafer thinning technological evaluations,” Japan J. Appl. Phys., vol. 28, no. 8, pp. 1426—1443, 1989.
    • (1989) Japan J. Appl. Phys. , vol.28 , Issue.8 , pp. 1426-1443
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  • 5
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    • V. Lehmann, U. Gosele, and K. Mitani, “Contamination protection of semiconductor surfaces by wafer bonding,” Solid State TechnoL, vol. 33, no. 4, pp. 91–92, 1990.
    • (1990) Solid State TechnoL , vol.33 , Issue.4 , pp. 91-92
    • Lehmann, V.1    Gosele, U.2    Mitani, K.3
  • 6
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    • Bonding of silicon wafers for silicon-on-insulator
    • W. P. Maszara, G. Goetz, A. J. Caviglia, “Bonding of silicon wafers for silicon-on-insulator,” J. Appl. Phys., vol. 64, no. 10, pp. 4943–4950, 1988.
    • (1988) J. Appl. Phys. , vol.64 , Issue.10 , pp. 4943-4950
    • Maszara, W.P.1    Goetz, G.2    Caviglia, A.J.3
  • 7
    • 0023043012 scopus 로고
    • Wafer bonding for silicon-on-insulator technologies
    • J. B. Lasky, “Wafer bonding for silicon-on-insulator technologies,” Appl. Phys. Lett., vol. 48, no. 1, pp. 78–80, 1986.
    • (1986) Appl. Phys. Lett. , vol.48 , Issue.1 , pp. 78-80
    • Lasky, J.B.1
  • 9
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    • Theory of Elasticity
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    • (1951)
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  • 10
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    • (1955)
    • Timoshenko, S.P.1
  • 11
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    • cantilever microbeams: A new technique fortesting the mechanical properties of thin films
    • T. P. Weihs, S. Hong, J. C. Bravman, and W. deflection of cantilever microbeams: A new technique fortesting the mechanical properties of thin films,” J. Mater. Res., vol. 3, no. 5, pp. 931–942, 1988.
    • (1988) J. Mater. Res. , vol.3 , Issue.5 , pp. 931-942
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  • 12
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    • K. E. Petersen and C. R. Guamieri, “Young's modulus measurements of thin films using micromechanics,” J. Appl. Phys., vol. 50, no. 11, pp. 6761–6766, 1979.
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    • Petersen, K.E.1    Guamieri, C.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.