Reliability defect detection and screening during processing--Theory and implementation

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1992, Pages 268-275

  Huston, Hance H ^a   Clarke, C Patrick ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ELECTRIC VARIABLES MEASUREMENT; INSPECTION; INTEGRAL EQUATIONS; RELIABILITY;

IN PROCESS MEASUREMENTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0026836537     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/relphy.1992.187656     Document Type: Conference Paper

References (8)