Thermal analysis and control for sputtering deposition of high-Tc superconducting films

Journal of Heat Transfer

Volumn 114, Issue 1, 1992, Pages 255-263

  Flik, M I ^a   Choi, B I ^a   Anderson, A C ^a   Westerheim, A C ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

High temperature phenomena; Materials processing and manufacturing processes; Radiation

Indexed keywords

HEAT TRANSFER - RADIATION; HIGH TEMPERATURE SUPERCONDUCTORS; SPUTTERING; TEMPERATURE MEASUREMENT;

HIGH TEMPERATURE SUPERCONDUCTING FILMS; SPUTTERING CHAMBER HEAT TRANSFER MODES; SPUTTERING SYSTEM RADIATIVE HEAT EXCHANGE;

SUPERCONDUCTING FILMS;

EID: 0026818029     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2911255     Document Type: Article

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