A Selective Etch for InAIAs Over InGaAs and for Different InGaAIAs Quaternaries

Journal of the Electrochemical Society

Volumn 139, Issue 1, 1992, Pages L10-L11

  Chough, K B ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS - REACTION KINETICS; SEMICONDUCTING INDIUM COMPOUNDS;

INDIUM ALUMINUM ARSENIDE; INDIUM GALLIUM ALUMINUM ARSENIDE; INDIUM GALLIUM ARSENIDE;

SEMICONDUCTOR MATERIALS;

EID: 0026714268     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2069208     Document Type: Article

References (2)

1. W. P. Dumke J. M. Woodall, and V. L. Rideout, Solid State Electronics 15, 1339 (1972).
2. K. L. Conway, A. G. Dentai, and J. C. Campbell, J. Appl. Phys., 53, 1836 (1982).