Thermal conductivity of thin SiO2 films

Thin Solid Films

Volumn 207, Issue 1-2, 1992, Pages 197-201

  Brotzen, F R ^a   Loos, P J ^b   Brady, D P ^b  

^a RICE UNIVERSITY   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; PLASMA DEVICES; SILICA--CHEMICAL VAPOR DEPOSITION; THERMAL CONDUCTIVITY;

HEAT LOSSES; MONOCRYSTALS;

SILICA;

EID: 0026707170     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(92)90123-S     Document Type: Article

References (9)

1. Electromigration—A brief survey and some recent results
2. Standard guide for design of straight-line test structures for detecting metallization open-circuit or resistance-increase failure due to electromigration
3. Heat transfer in power transistors