A fully SiO2-isolated self-aligned SOI-bipolar transistor for VLSIs

Proceedings of the 1991 Bipolar Circuits and Technology Meeting

Volumn , Issue , 1992, Pages 53-58

  Nishizawa, H ^a   Azuma, S ^a   Yoshitake, T ^a   Yamada, K ^a   Ikeda, T ^a   Masuda, H ^a   Anzai, A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, VLSI; LOGIC CIRCUITS, EMITTER COUPLED; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE--SILICON ON INSULATOR TECHNOLOGY; TRANSISTORS, BIPOLAR;

ECL GATE ARRAYS; HIGH-SPEED ECL; POLYSILICON; SOI-BIPOLAR TRANSISTORS;

LOGIC DEVICES;

EID: 0026624089     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)