Effect of additives on the electrostatic force of alumina electrostatic chucks

Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

Volumn 100, Issue 1157, 1992, Pages 1-6

  Watanabe, Toshiya ^a   Kitabayashi, Tetsuo ^a  

^a TOTO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS - ADDITIVES; ELECTRIC MEASUREMENTS - LOW TEMPERATURE PROPERTIES; ELECTRIC MEASUREMENTS - RESISTANCE; ELECTROSTATICS - MATHEMATICAL MODELS;

ADHESION FORCE; ELECTROSTATIC CHUCKS; ELECTROSTATIC FORCE; TRANSITION METAL OXIDE;

ALUMINA;

EID: 0026622411     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.100.1     Document Type: Article

References (7)