Numerical reference models for optical metrology simulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1673, Issue , 1992, Pages 70-82

  Wojcik, Gregory L ^a   Mould Jr , John ^a   Marx, Egon ^a   Davidson, Mark P ^a  

^a WEIDLINGER ASSOCIATES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CODES, SYMBOLIC--APPLICATIONS; COMPUTER PROGRAMMING--ALGORITHMS; IMAGING TECHNIQUES--APPLICATIONS; MATHEMATICAL TECHNIQUES--FINITE ELEMENT METHOD; MATHEMATICAL TECHNIQUES--INTEGRAL EQUATIONS;

BOUNDARY INTEGRALS; NUMERICAL REFERENCE MODELS (NRM'S); OPTICAL METROLOGY SIMULATION; SCALAR TWO-DIMENSIONAL NRM'S; SCATTERED FIELD COMPARISON;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0026471425     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)