Sige waveguide photodetectors grown by rapid thermal chemical vapour deposition

Electronics Letters

Volumn 28, Issue 3, 1992, Pages 269-271

  Jalali, B ^a   Levi, A F J ^a   Ross, F ^a   Fitzgerald, E A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

materials; Photodetectors; Semiconductor devices; Vapour deposition

Indexed keywords

CRYSTALS--EPITAXIAL GROWTH; QUANTUM THEORY; SEMICONDUCTING SILICON COMPOUNDS--GROWTH; SEMICONDUCTOR DIODES, PHOTODIODE;

PIN PHOTODIODES; QUANTUM WELLS; WAVEGUIDE PHOTODETECTORS;

WAVEGUIDES, OPTICAL;

EID: 0026435491     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19920166     Document Type: Article

References (8)

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