Integrated piezoelectric polymers for microsensing and microactuation applications

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 32, Issue , 1991, Pages 171-179

  Rashidian, Bizhan ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; MATERIALS--FABRICATION; POLYMERS--PIEZOELECTRIC EFFECTS; SENSORS;

MICROACTUATORS; MICROMACHINING TECHNIQUES; MICROSENSORS; PIEZOELECTRIC POLYMERS;

PIEZOELECTRIC MATERIALS;

EID: 0026407941     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)