The effect of corner radius of curvature on the mechanical strength of micromachined single-crystal silicon structures

Transducers '91

Volumn , Issue , 1991, Pages 197-200

  Pourahmadi, Farzad ^a   Gee, Dale ^a   Petersen, Kurt ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - MACHINING; DIAPHRAGMS; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; SEMICONDUCTING SILICON - ETCHING; STRESSES - ANALYSIS;

MICROMACHINED SILICON CORNERS; MICROMACHINED SINGLE-CRYSTAL SILICON; SILICON FRACTURE STRENGTH;

SENSORS;

EID: 0026407191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)