Electroosmotic pumping within a chemical sensor system integrated on silicon

Transducers '91

Volumn , Issue , 1991, Pages 792-795

  Harrison, D Jed ^a   Manz, Andreas ^a   Glavina, Paul G ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

OSMOSIS; PUMPS; SENSORS - SILICON SENSORS; SUBSTRATES;

ELECTROOSMOTIC PUMPING; INTEGRATED CHEMICAL SENSOR; OXIDE/NITRIDE FILM;

ELECTROMECHANICAL DEVICES;

EID: 0026407181     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)