A micromachining technique for a thin silicon membrane using merged epitaxial lateral overgrowth of silicon and SiO2 for an etch-stop

Transducers '91

Volumn , Issue , 1991, Pages 1028-1031

  Pak, James J ^a   Kabir, Abul E ^a   Neudeck, Gerold W ^a   Logsdon, James H ^a   DeRoo, David R ^a   Staller, Steven E ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - EPITAXIAL GROWTH; ETCHING; METAL CUTTING - MICROMACHINING; SILICON AND ALLOYS;

MERGED EPITAXIAL LATERAL OVERGROWTH (MELO); SILICON DIAPHRAGM FABRICATION;

SENSORS;

EID: 0026407177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)