A threshold pressure switch utilizing plastic deformation of silicon

Transducers '91

Volumn , Issue , 1991, Pages 177-180

  Huff, Michael A ^a   Nikolich, Aleks D ^a   Schmidt, Martin A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES;

SILICON ELECTRODES; SILICON PLASTIC DEFORMATION; THRESHOLD PRESSURE SWITCH;

SENSORS;

EID: 0026404680     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)