Positive working photosensitive polymers for semiconductor surface coating

Proceedings - Electronic Components Conference

Volumn , Issue , 1991, Pages 564-567

  Banba, T ^a   Takeuchi, E ^a   Tokoh, A ^a   Takeda, T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

POLYIMIDES--APPLICATIONS; SEMICONDUCTOR MATERIALS--COATINGS; SILANES--EFFECTS;

HYDROXYL GROUPS; PHOTOSENSITIVE POLYMERS; POLYBENZOXAZOLE (PBO) PRECURSOR; SEMICONDUCTOR SURFACE COATING; SILANE COUPLING AGENTS;

POLYMERS;

EID: 0026402897     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)