Surface micromachined structures fabricated with silicon fusion bonding

Transducers '91

Volumn , Issue , 1991, Pages 397-399

  Petersen, Kurt ^a   Gee, Dale ^a   Pourahmadi, Farzad ^a   Craddock, Russell ^a   Brown, Joe ^a   Christel, Lee ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; METAL CUTTING - MICROMACHINING; SENSORS - SILICON SENSORS; SURFACES;

POLYSILICON SACRIFICIAL ETCHING; REACTIVE ION ETCHING; SILICON FUSION BONDING; SINGLE-CRYSTAL SILICON; SURFACE MICROMACHINING;

SUBSTRATES;

EID: 0026399905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)