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Volumn , Issue , 1991, Pages 627-630
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Fabrication of micro-bolometer on silicon substrate by anisotropic etching technique
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
INFRARED RADIATION - SENSORS;
MEMBRANES;
OPTIMIZATION;
SENSORS - SILICON SENSORS;
FLOATING MEMBRANE BOLOMETER;
METAL-FILM MICROBOLOMETER;
MONOLITHIC METAL BOLOMETERS;
SILICON MICROSENSORS;
THERMAL IMPEDANCE;
BOLOMETERS;
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EID: 0026399899
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (8)
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References (8)
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