Streaming potential ESD shifts during post dicing high pressure spray rinse operations

Electrical Overstress/Electrostatic Discharge Symposium Proceedings

Volumn , Issue , 1991, Pages 50-58

  Carter, George ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE;

ESD SHIFTS; STREAMING POTENTIALS; WATER RINSE OPERATIONS;

ELECTROSTATICS;

EID: 0026399183     PISSN: 07395159     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)