Resonant beam pressure sensor fabricated with silicon fusion bonding

Transducers '91

Volumn , Issue , 1991, Pages 664-667

  Petersen, Kurt ^a   Pourahmadi, Farzad ^a   Brown, Joe ^a   Parsons, Philip ^a   Skinner, Mike ^a   Tudor, John ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; INTEGRATED CIRCUIT MANUFACTURE - ETCHING; MATHEMATICAL TECHNIQUES - FINITE ELEMENT METHOD; SENSORS - SILICON SENSORS; VIBRATIONS;

RESONANT BEAM PRESSURE SENSOR; SILICON FUSION BONDING; SOFTWARE PACKAGE ANSYS;

PRESSURE TRANSDUCERS;

EID: 0026397814     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)