Submicron mechanically planarized shallow trench isolation with field shield

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1991, Pages 89-90

  Lindenberger, W S ^a   Kornblit, A ^a   Lai, W ^a   Hillenius, S J ^a   Chen, M L ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS, CMOS; SEMICONDUCTOR DEVICES, MOS;

FIELD SHIELDS; MECHANICALLY PLANARIZED SHALLOW TRENCH ISOLATION; SUBMICRON TRANSISTORS;

TRANSISTORS;

EID: 0026393173     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)