Batch-processing of high-performance amorphous-silicon/silicon-nitride thin-film transistors

Conference Record of the 1991 International Display Research Conference

Volumn , Issue , 1991, Pages 85-88

  Ahn, B C ^a   Kanoh, H ^a   Sugiura, O ^a   Matsumura, M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BATCH PROCESSING; SEMICONDUCTING FILMS--ELECTRONIC PROPERTIES; SEMICONDUCTING SILICON COMPOUNDS--CHEMICAL VAPOR DEPOSITION; TRANSISTORS--FABRICATION;

AMORPHOUS-SILICON/SILICON-NITRIDE THIN FILM TRANSISTORS; DEPOSITION PARAMETER EFFECTS; SUBTHRESHOLD VOLTAGE SWING;

TRANSISTORS;

EID: 0026390514     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)