A three-dimensional dynamic simulation of borophosphosilicate glass flow

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1991, Pages 99-100

  Umimoto, Hiroyuki ^a   Odanaka, Shinji ^a   Imai, Shinichi ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE, SEMICONDUCTOR; FLOW OF FLUIDS--COMPUTER SIMULATION; INTEGRATED CIRCUIT MANUFACTURE; MICROSCOPIC EXAMINATION;

BOROPHOSPHOSILICATE GLASS; PLANARIZATION; VISCOSITY MODELING;

GLASS;

EID: 0026388647     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)