Micromachining processes and structures in micro-optics and optoelectronics

Journal of Micromechanics and Microengineering

Volumn 1, Issue 4, 1991, Pages 199-222

  Deimel, P P ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROOPTICS;

MICROMACHINING; OPTOELECTRONIC DEVICES;

OPTICAL DEVICES;

EID: 0026387982     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/1/4/002     Document Type: Article

References (64)

1. Alignment-tolerant optical-fiber tips for laser transmitters
2. GaAs single-mode rib waveguides with reactive ion-etched totally reflecting corner mirrors
3. GaAs integrated optoelectronics
4. Preferential Etching and Etched Profile of GaAs
5. Optical computing and related microoptic devices