Effect of water vapor on the growth of textured zno-based films for solar cells by dc-magnetron sputtering

Japanese Journal of Applied Physics

Volumn 30, Issue 12 R, 1991, Pages 3344-3348

  Nakada, Tokio ^a   Ohkubo, Yukinobu ^a   Kunioka, Akio ^a  

^a AOYAMA GAKUIN UNIVERSITY   (Japan)

Author keywords

Aluminum doped zinc oxide films; Solarcells; Sputtering; Transparent conducting films; Water vapor; Zinc oxide films

Indexed keywords

LIGHT--TRANSMISSION; SOLAR CELLS; SPUTTERING; VAPORS; WATER;

COLUMNAR STRUCTURE; MAGNETRON SPUTTERING; ZINC OXIDES;

ZINC COMPOUNDS;

EID: 0026385486     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.30.3344     Document Type: Article

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