A micromachined flow sensor for measuring small liquid flows

Transducers '91

Volumn , Issue , 1991, Pages 41-44

  Branebjerg, Jens ^a   Jensen, Ole Sondergard ^a   Laursen, Niels Gravgaard ^a   Leistiko, Otto ^a   Soeberg, Henrik ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

LIQUIDS - CHEMICAL ANALYSIS; SENSORS - SILICON SENSORS; THERMAL CONDUCTIVITY;

ANISOTROPIC ETCHING; BULK SILICON MICROMACHINING; FLOW SENSOR; SMALL LIQUID FLOWS MEASUREMENT;

FLOWMETERS;

EID: 0026385209     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)