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Volumn , Issue , 1991, Pages 245-248
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Fabrication and performance of a fully integrated μ-pirani pressure gauge with digital readout
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC MEASURING BRIDGES;
INSTRUMENTS - DIGITAL READOUT;
INTEGRATED CIRCUITS;
SENSORS - SILICON SENSORS;
THERMAL CONDUCTIVITY;
A/D CONVERTER;
MICRO-PIRANI PRESSURE GAGE;
ON-CHIP MICROBRIDGE SENSOR;
GAGES;
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EID: 0026372169
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (24)
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References (12)
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