Low resistance anodized Ta/TaN line TFT-LCD

Conference Record of the 1991 International Display Research Conference

Volumn , Issue , 1991, Pages 93-96

  Ikeda, Mitsushi ^a   Murooka, Michio ^a   Higuchi, Masatoshi ^a   Taniguchi, Yasuyuki ^a   Nishimura, Kazunari ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES--APPLICATIONS; TANTALUM COMPOUNDS--APPLICATIONS; TRANSISTORS--THIN FILMS;

LOW RESISTANCE ANODIZED TFT-LCD; PLASMA CHEMICAL VAPOR DEPOSITION (PCVD); POINT DEFECTS;

DISPLAY DEVICES;

EID: 0026369429     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)