Buckling behavior of boron-doped pt silicon diaphragms

Transducers '91

Volumn , Issue , 1991, Pages 201-204

  Ding, Xiaoyi ^a   Ko, Wen H ^a  

^a Meadows IL USA ^*

Author keywords

[No Author keywords available]

Indexed keywords

OXIDES; SEMICONDUCTING SILICON - DOPING; SENSORS - SILICON SENSORS; STRESSES - ANALYSIS;

BORON-DOPED SILICON DIAPHRAGMS; DIAPHRAGM BUCKLING;

SENSORS;

EID: 0026368425     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)