Novel: A nonlinear viscoelastic model for thermal oxidation of silicon

COMPEL - The international journal for computation and mathematics in electrical and electronic engineering

Volumn 10, Issue 4, 1991, Pages 341-353

  Peng, J P ^a   Chidambarrao, D ^a   Srinivasan, G R ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER PROGRAMMING; COMPUTER SOFTWARE; VISCOELASTICITY;

SOFTWARE PACKAGE NOVEL; THERMAL OXIDATION;

SEMICONDUCTING SILICON;

EID: 0026368089     PISSN: 03321649     EISSN: None     Source Type: Journal    
DOI: 10.1108/eb051711     Document Type: Review

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