Astigmatism and field curvature from pin-bars

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1463, Issue , 1991, Pages 282-291

  Kirk, Joseph P ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA PROCESSING--DATA REDUCTION AND ANALYSIS; LENSES--TESTING; LITHOGRAPHY; OPTICAL INSTRUMENTS--APPLICATIONS;

ASTIGMATISM; FIELD CURVATURE; LITHOGRAPHY LENSES; OPTICAL MICROSCOPE; PIN BARS; RESOLUTION TEST;

LENSES;

EID: 0026366649     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)