Multilayer vertical stacked capacitors (MVSTC) for 64Mbit and 256Mbit DRAMs

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1991, Pages 13-14

  Temmler, D ^a  

^a IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE, DIGITAL--RANDOM ACCESS; RELIABILITY;

DRAMS; MEMORY CELLS; MULTILAYER VERTICAL STACKED CAPACITORS;

CAPACITORS;

EID: 0026366632     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)