Fundamental studies of the steered arc technique

Surface and Coatings Technology

Volumn 49, Issue 1-3, 1991, Pages 244-252

  Ives, M ^a   Brooks, J S ^a   Cawley, J ^a   Burgmer, W ^b  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^b Multi Arc GmbH ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS - VAPOR DEPOSITION; COATINGS - WEAR RESISTING; ELECTRIC ARCS;

CATHODIC ARC EVAPORATION; MAGNETIC ARC STEERING; PHYSICAL VAPOR DEPOSITION; STEERED ARC TECHNIQUE; TITANIUM NITRIDE;

COATINGS;

COATINGS-CERAMIC; STEERED ARC TECHNIQUE; TITANIUM NITRIDE; VAPOUR DEPOSITION;

EID: 0026360640     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(91)90063-3     Document Type: Article

References (19)

1. CATHODIC ARC EVAPORATION AS A COATING TECHNIQUE
2. Review of ion-based coating processes derived from the cathodic arc
3. Arc evaporation of hard coatings: Process and film properties
4. Comparison of the steered arc and random arc techniques
5. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
6. The Activated Reactive Evaporation Process
7. Proc. Int. Conf. on Metallurgical Coatings