Durability and structure of rf sputtered carbon-nitrogen thin film overcoats on rigid disks of magnetic thin film media

IEEE Transactions on Magnetics

Volumn 27, Issue 6, 1991, Pages 5163-5165

  Yeh, Tse An ^a   Lin, Chien Li ^a   Sivertsen, John M ^a   Judy, Jack H ^b  

^a The Center for Micromagnetics and Information Technologies Department of Chemical Engineering and Materials Science ^*

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON--THIN FILMS; MAGNETIC MATERIALS--THIN FILMS; MICROSCOPIC EXAMINATION--TRANSMISSION ELECTRON MICROSCOPY; SPECTROSCOPY, PHOTOELECTRON; SPUTTERING;

CONTACT DRAG TESTS; RF SPUTTERING;

DATA STORAGE, MAGNETIC;

EID: 0026260980     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.278774     Document Type: Article

References (10)

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