A novel body contact for SIMOX based SOI MOSFETs

Solid State Electronics

Volumn 34, Issue 10, 1991, Pages 1071-1075

  Patel, M ^a   Ratnam, P ^a   Salama, C A T ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES, MOSFET;

SIMOX DEVICES; SIMOX/SOI DEVICES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0026239245     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/0038-1101(91)90102-5     Document Type: Article

References (12)

1. Optimization of oxygen-implanted silicon substrates for CMOS devices by electrical characterization