Residual stress measurements of thin aluminum metallizations by continuous indentation and x-ray stress measurement techniques

Journal of Materials Research

Volumn 6, Issue 10, 1991, Pages 2084-2090

  LaFontaine, W R ^a   Paszkiet, C A ^a   Korhonen, M A ^a   Li, Che Yu ^b  

^a IBM   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIC FILMS - RESIDUAL STRESSES; RELAXATION PROCESSES; STRESSES - MEASUREMENTS; X-RAYS - DIFFRACTION;

CONTINUOUS INDENTATION; STRESS RELAXATION;

ALUMINUM AND ALLOYS;

EID: 0026237909     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1991.2084     Document Type: Article

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