Influence of laser fluence on structural and ferroelectric properties of lead-zirconate-titanate thin films prepared

Japanese Journal of Applied Physics

Volumn 30, Issue 9S, 1991, Pages 2167-2169

  Ablation, Laser ^a   Kidoh, Hideo ^a   Ogawa, Toshio ^a   Yashima, Hideyuki ^b   Morimoto, Akiharu ^b   Shimizu, Tatsuo ^b  

^a MURATA MANUFACTURING CO LTD   (Japan)

^b KANAZAWA UNIVERSITY   (Japan)

Author keywords

Coercive field; High deposition rate; Laser ablation; Laser fluence; No deviation of composition; PZT thin film; Remanent polarization

Indexed keywords

ABLATION - LASER APPLICATIONS; LASERS, EXCIMER;

COERCIVE FIELD; LASER ABLATION; LASER FLUENCE; LEAD TITANATE ZIRCONATE; REMANENT POLARIZATION;

FERROELECTRIC MATERIALS;

EID: 0026225929     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.30.2167     Document Type: Article

References (9)

1. S. Otsubo, T. Minamikawa, Y. Yonezawa, T. Maeda, A. Moto, A. Morimoto and T. Shimizu: Jpn. J. Appl. Phys. 27 (1988) L1999.
2. S. Otsubo, T. Minamikawa, Y. Yonezawa, T. Maeda, A. Morimoto and T. Shimizu: Jpn. J. Appl. Phys. 28 (1989) 2211.
3. S. Otsubo, T. Maeda, T. Minamikawa, Y. Yonezawa, A. Morimoto and T. Shimizu: Jpn. J. Appl. Phys. 29 (1989) L133.
4. A. Morimoto, S. Otsubo, T. Shimizu, T. Minamikawa, Y. Yonezawa, H. Kidoh and T. Ogawa: Mater. Res. Soc. Symp. Proc. Laser Ablation for Materials Synthesis, San Francisco, 1990 (Material Research Society, Pittsburgh, 1990) vol. 191 p. 31.
5. G. M. Davis and M. C. Gower: Appl. Phys. Lett. 55 (1989) 112.
6. K. L. Saenger, R. A. Roy, K. F. Etzold and J. J. Cuomo: Mater. Res. Soc. Symp. Proc. Ferroelectric Thin Films, San Francisco, 1990 (Material Research Society, Pittsburgh, 1990) vol. 200 p. 115.
7. C. K. Chiang, L. P. Cook, P. K. Schenck, P. S. Brody and J. M. Benedetto: Mater. Res. Soc. Symp. Proc. Ferroelectric Thin Films, San Francisco, 1990 (Material Research Society, Pittsburgh, 1990) vol. 200 p. 133.
8. H. Buhay, S. Sinharoy, W. H. Kasner, M. H. Francombe, D. R. Lampe and E. Stepke: Appl. Phys. Lett. 58 (1991) 1470.
9. H. Kidoh, T. Ogawa, A. Morimoto and T. Shimizu: Appl. Phys. Lett. 58 (1991) 2910.